Meander-Type Lines: An Innovative Design for On-Wafer TRL Calibration for mmW and Sub-mmW Frequencies Measurements

In this article, we introduce novel transmission line standards for on-wafer thru-reflect-line (TRL) calibration employing a meandering architecture, which aims to keep the interprobe distance constant and avoid any probe separation during measurement process, yet establishing required signal path length between ports. Measurements will be performed up 500 GHz on passive de-embedding structures silicon-germanium heterojunction bipolar transistor (SiGe HBT); they calibrated with both classic approach “meander-type” technique. Furthermore, measurements evaluated by means of electromagnetic (EM) simulation: For purpose, make use Ansys High-Frequency Structure Simulator (HFSS) test structures. Finally, joint EM-SPICE cosimulation analysis allow us provide simulated data transistor, thus extending our study active devices; complete characterization an insight physical limits